Learn about MEMS
Microelectromechanical Systems (MEMS) is the technology of the very small.
MEMS devices refer to mechanical components on the micrometre size and include 3D lithographic features of various geometries. They are typically manufactured using planar processing similar to semiconductor processes such as surface micromachining and/or bulk micromachining. These devices generally range in size from a micrometre (a millionth of a metre) to a millimetre (thousandth of a metre). At these size scales, a human's intuitive sense of physics do not always hold true. Due to MEMS' large surface area to volume ratio, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass. They are fabricated using modified silicon fabrication technology (used to make electronics), molding and plating, wet etching (KOH, TMAH) and dry etching (RIE and DRIE), electro discharge machining (EDM), and other technologies capable of manufacturing very small devices. MEMS sometimes go by the names micromechanics, micro machines, or micro system technology (MST).
