NASA’s Goddard Space Flight Center is allowing United States companies, universities, and other government agencies access to its DDL for prototyping and developing microfabricated devices primarily in the detector, MEMS, and nanotechnology realms. After extensive safety and tool training, users will be allowed access to a toolset that can produce just about any surface or bulk micro-machined MEMS device and a great variety of semiconducting or superconducting detectors.

The DDL offers unique processing capabilities (even MEMS fabrication), with equipment that includes:

• MeV ion implantation
• Direct-write e-beam lithography
• Dedicated indium and magnetic material deposition chambers